The effect of thermal annealing on the properties of IGZO TFT prepared by atmospheric pressure plasma jet
نویسندگان
چکیده
Department of Electronics Engineering, Chung Hua University, Hsinchu, Taiwan Department of Electronics Engineering & Institute of Electronics, National Chiao Tung University, Hsinchu, Taiwan College of Electrical and Information Engineering, I-Shou University, Kaohsiung County, Taiwan Department of Electronics Engineering, Technology and Science Institute of Northern Taiwan, Taipei, Taiwan Industrial Technology Research Institute, Mechanical and Systems Research Laboratories, Hsinchu, Taiwan
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